FOUP presence sensor
Detect FOUP cassettes reliable without no matter the color of surface or shape of FOUP. With SEMI standard.
Challenge
Detecting FOUP cassettes on load port with an optical sensor is made difficult by the variety in color, surface condition and shape. Moreover, mechanical contact switch causes contamination and has a limited life time.
|
|
|
Solution
Omron's FOUP sensor offers stable detection without being affected by the color of surface or shape of FOUP. It conforms to SEMI standard (sensing pad). Optical detection of actuator operation ensures a long life.
|
Benefit
Easy maintenance with a long life and stable detection.
|
|
